JP Solan M.Tech

Can you plz tell me the syllabus of JP Solan M.Tech?

[Saksham]

You were searching for the syllabus of JP Solan M.Tech, so for this I am sharing the information with you:

Environment for VLSI Technology : Clean room and safety requirements. Wafer cleaning processes
and wet chemical etching techniques.
Impurity incorporation: Solid State diffusion modelling and technology; Ion Implantation modelling,
technology and damage annealing; characterisation of Impurity profiles.
Oxidation : Kinetics of Silicon dioxide growth both for thick, thin and ultrathin films. Oxidation
technologies in VLSI and ULSI; Characterisation of oxide films; High k and low k dielectrics for ULSI.
Lithography : Photolithography, E-beam lithography and newer lithography techniques for VLSI/ULSI;
Mask generation.
Chemical Vapour Deposition techniques : CVD techniques for deposition of polysilicon, silicon
dioxide, silicon nitride and metal films; Epitaxial growth of silicon; modelling and technology.
Metal film deposition : Evaporation and sputtering techniques. Failure mechanisms in metal
interconnects; Multi-level metallisation schemes.


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