Sathyabama Institute of Science and Technology M.E. - Applied Electronics SECA7034 RF MEMS and Its Applications Syllabus

[Arvind Kumar]

Sathyabama Institute of Science and Technology M.E. - Applied Electronics SECA7034 RF MEMS and Its Applications Syllabus

SATHYABAMA INSTITUTE OF SCIENCE AND TECHNOLOGY SCHOOL OF ELECTRICAL AND ELECTRONICS ENGINEERING

SECA7034 RF MEMS AND ITS APPLICATIONS
L T P Credits Total Marks
3 0 0 3 100

UNIT 1 MEMS AND FABRICATION TECHNIQUES 9 Hrs.
Micro fabrications for MEMS -Surface micromachining of silicon -Wafer bonding for MEMS-LIGA process-Electromechanical
transducers-Piezoelectric transducers - Electrostrictive transducers –Magnetostrictive transducers –Electrostatic actuators-
Electromagnetic transducers - Electrodynamics transducers- Electro thermal actuators

UNIT 2 MICRO SENSING 9 Hrs.
Piezoresistive sensing - Capacitive sensing - Piezoelectric sensing - Resonant sensing - Surface acoustic wave sensors.
Semiconductors : Electrical and chemical properties-Growth and deposition, Thin films for MEMS and their deposition
techniques -Oxide film formation by thermal oxidation -Deposition of silicon dioxide and silicon nitride - Polysilicon film
deposition -Ferroelectric thin films.

UNIT 3 MICRO STEREO LITHOGRAPHY 9 Hrs.
Materials for polymer MEMS: Classification of polymers -UV radiation curing –SU-8 for polymer MEMS. Micro stereo
lithography for polymer MEMS –Scanning method - Two-photon Micro stereo lithography Surface micromachining of
polymer MEMS -Projection method -Polymeric MEMS architecture with silicon, metal and ceramics.

UNIT 4 MEMS INDUCTORS AND CAPACITORS 9 Hrs.
MEMS inductors : Self-inductance and mutual inductance - Micro machined inductors - Effect of inductor layout - Reduction
of stray capacitance of planar inductors-Approaches for improving the quality factor -Folded inductors - Modeling and design
issues of planar inductors MEMS capacitors: MEMS gap-tuning capacitors - MEMS area-tuning capacitors - Dielectric
tunable capacitors.

UNIT 5 SWITCHES AND APPLICATIONS 9 Hrs.
Switch parameters- Basics of switching - Mechanical switches-Electronic switches- - Mechanical RF switches - PIN diode
RF switches- Electrostatic switching - Mercury contact switches -Magnetic switching- Electromagnetic switching - Thermal
switching. Dynamics of the switch operation: -Switching time and dynamic response - Threshold voltage. MEMS switch
design, modeling and evaluation. Introduction to Optical MEMS-Micro-machined antenna, Gyros and Bio-MEMS. MEMS
software introduction: COMSOL
Max 45 Hrs.

COURSE OUTCOMES
On completion of the course, student will be able to
CO1 - Demonstrate the MEMS fabrication techniques and function of the transducers.
CO2 - Explain the deposition techniques.
CO3 - Classify and analyse the characteristics different sensing devices.
CO4 - Demonstrate the Micro stereolithography techniques in polymer MEMS.
CO5 - Compare the properties of MEMS inductors and capacitors.
CO6 - Design and evaluate MEMS switches.

TEXT / REFERENCE BOOKS
1. Vijay K.Varadan, Vinoy.K.J and Jose.K.A, “RF MEMS and Their Applications”, Reprint, John Wiley & Sons, 2003.
2. Gabriel M. Rebeiz, “RF MEMS: Theory, Design, and Technology”, Wiley, 2003.
3. Hector J. De Los Santos, “Introduction to Microelectromechanical Microwave Systems”, 2nd Edition, Artech House,
2004.
4. Jacopo Iannacci, “Practical Guide to RF-MEMS”, John Wiley & Sons, 2013.
5. Nadim Maluf, Kirt Williams, "Introduction to Microelectromechanical Systems Engineering", Artech House, 2004.

END SEMESTER EXAMINATION QUESTION PAPER PATTERN
1.
Max. Marks: 100 Exam Duration: 3 Hrs.
PART A: 5 Questions of 6 marks each - No choice 30 Marks
PART B: 2 Questions from each unit of internal choice, each carrying 14 marks 70 Marks